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Home › Polysilicon gate having a metal plug, for reduced gate resistance, within a trench extending into the polysilicon layer of the gate

Polysilicon gate having a metal plug, for reduced gate resistance, within a trench extending into the polysilicon layer of the gate

US Patent 6165882 · Granted Dec 26, 2000

Estimated economic value: $2,711,000 ⓘ

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