Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Particle beam system with dynamic focusing

Particle beam system with dynamic focusing

US Patent 6130432 · Granted Oct 10, 2000

Estimated economic value: $63,451,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and systems for accessing remote digital data over a wide area network (2022
Carbon tube for electron beam application2011
Mask clamping device2004
Multi-beam hybrid solenoid lens electron beam system2004
Multi-beam hybrid solenoid lens electron beam system2004
Solenoid electron beam lenses with high demagnification and low aberrations2003
Solenoid electron beam lenses with high demagnification and low aberrations2003
Multipole electrostatic e-beam deflector2003
Multipole electrostatic e-beam deflector2003
Accurate real-time landing angle and telecentricity measurement in lithographic 2002
Constant power dynamic focus coil2002
Calibration target for electron beams2002