Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate retaining ring

Substrate retaining ring

US Patent 6116992 · Granted Sep 12, 2000

Estimated economic value: $123,501,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate retaining ring2003
Carrier head with layer of conformable material for a chemical mechanical polish2002
Retainers and non-abrasive liners used in chemical mechanical polishing2002
Dispersed resins for use in coating compositions2002
End effector for pad conditioning2000
Carrier head with layer of conformable material for a chemical mechanical polish2000
Magnetic carrier head for chemical mechanical polishing1999
Linear conditioner apparatus for a chemical mechanical polishing system1999
Apparatus and method to determine the coefficient of friction of a chemical mech1998
Metal organic compounds and their use1997
Metal organic compounds and their use1997
Water-based water repellents1995