Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Self-sensing wafer holder and method of using

Self-sensing wafer holder and method of using

US Patent 6113165 · Granted Sep 5, 2000

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Augmented reality system and operation method thereof2024
Exhaust system and mini-exhaust static pressure controlling apparatus thereof2008
Wafer cassette pod equipped with position sensing device2004
Apparatus for clamping and transporting a semiconductor wafer2003
Apparatus and method for transferring wafers by robot2001
Method and apparatus for eliminating trapped air from a liquid flow1998