Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Dual-domain point diffraction interferometer

Dual-domain point diffraction interferometer

US Patent 6100978 · Granted Aug 8, 2000

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Micron-scale lens array having diffracting structures2013
Diffractive optical element for extreme ultraviolet wavefront control2006
Diffractive optical element for extreme ultraviolet wavefront control2006
Extended surface parallel coating inspection method2006
Method and apparatus for inspecting an EUV mask blank2005
Holographic illuminator for synchrotron-based projection lithography systems2005
Method of fabricating reflection-mode EUV diffusers2005
Apparatus for generating partially coherent radiation2005
Apparatus for generating partially coherent radiation2004
Synchrotron-based EUV lithography illuminator simulator2004
System for inspecting EUV lithography masks2004
Dual-domain lateral shearing interferometer2004