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Home › Low dielectric constant composite film for integrated circuits of an inorganic aerogel and an organic filler grafted to the inorganic material

Low dielectric constant composite film for integrated circuits of an inorganic aerogel and an organic filler grafted to the inorganic material

US Patent 6087729 · Granted Jul 11, 2000

Estimated economic value: $82,106,000 ⓘ

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