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Home › Method manifesting a wide process window and using hexafluoropropane or other hydrofluoropropanes to selectively etch oxide

Method manifesting a wide process window and using hexafluoropropane or other hydrofluoropropanes to selectively etch oxide

US Patent 6074959 · Granted Jun 13, 2000

Estimated economic value: $124,024,000 ⓘ

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