Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged particle beam performance measurement system and method thereof

Charged particle beam performance measurement system and method thereof

US Patent 5936252 · Granted Aug 10, 1999

Estimated economic value: $20,467,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Using E0 exposures for track/cluster monitoring2023
Personnel-tolerant carbon dioxide beamline variation reduction2022
Lithography process delay characterization and effective dose compensation2021
Lithographic dose characterization2021
Baseline overlay control with residual noise reduction2020
Determination of lithography effective dose uniformity2019
Determination of lithography effective dose uniformity2019
Microelectronic substrate having removable edge extension element2015
Microelectronic substrate having removable edge extension element2012
Lithography tool image quality evaluating and correcting2008
Lithography tool test patterns and method2006
Lithography tool image quality evaluating and correcting2005