{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments", "item": "https://www.patentleaderboard.com/patent/5869833"}]}
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Home › Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments

Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments

US Patent 5869833 · Granted Feb 9, 1999

Estimated economic value: $85,615,000 ⓘ

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