{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Electrochemical etching apparatus and method for spirally etching a workpiece", "item": "https://www.patentleaderboard.com/patent/5865984"}]}

Home › Electrochemical etching apparatus and method for spirally etching a workpiece

Electrochemical etching apparatus and method for spirally etching a workpiece

US Patent 5865984 · Granted Feb 2, 1999

Estimated economic value: $19,134,000 ⓘ

Assignee

IBM

Inventors

William E. Corbin, Jr. (4 patents)
Madhav Datta (49 patents)
Thomas Edward Dinan (26 patents)
Frederick William Kern, Jr. (14 patents)

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