Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Control of etch selectivity

Control of etch selectivity

US Patent 5683538 · Granted Nov 4, 1997

Estimated economic value: $29,270,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Solid waste interceptor for a drain2022
In-situ oxidized NiO as electrode surface for high k MIM device2019
Apparatus for treating waste water2015
Methods to control the threshold voltage of a deep trench corner device2003
Apparatus for mapping scratches in an oxide film2001
Deep trench cell capacitor with inverting counter electrode2001
Method for mapping scratches in an oxide film2000
Combined emissivity and radiance measurement for determination of temperature of1999
Combined emissivity and radiance measurement for determination of temperature of1999
Method and apparatus for imaging surface topography of a wafer1999
Deep trench cell capacitor with inverting counter electrode1998
Control of etch selectivity1998