Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Illumination tailoring system using photochromic filter

Illumination tailoring system using photochromic filter

US Patent 5614990 · Granted Mar 25, 1997

Estimated economic value: $8,853,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for forming a time-averaged line image2014
Reticle carrier2014
Determining lithographic set point using optical proximity correction verificati2013
Diagnosing in-line critical dimension control adjustments using optical proximit2013
Optical proximity correction verification accounting for mask deviations2013
Reticle carrier2013
Systems and methods for forming a time-averaged line image2013
EMF correction model calibration using asymmetry factor data obtained from aeria2012
Method for creating electrically testable patterns2012
Photomask design verification2012
Method of manufacture of damascene reticle2012
Systems and methods for forming a time-averaged line image2011