Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Semiconductor with implanted dielectric layer having patched pin-holes

Semiconductor with implanted dielectric layer having patched pin-holes

US Patent 5608252 · Granted Mar 4, 1997

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for forming silicon-germanium/Si/silicon dioxide heterostructure using ge1998
Silylated photo-resist layer and planarizing method1998
GE-SI SOI MOS transistor and method of fabricating same1998
Method of treating silicon to obtain thin, buried insulating layer1996
Method of forming a pattern of silylated planarizing photoresist1996
Graded implantation of oxygen and/or nitrogen constituents to define buried isol1996
Silylated photoresist layer and planarizing method1996
Shallow SIMOX processing method using molecular ion implantation1995
Graded implantation of oxygen and/or nitrogen constituents to define buried isol1995
Pin-hole patch method for implanted dielectric layer1994