Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sidewall passivation by oxidation during refractory-metal plasma etching

Sidewall passivation by oxidation during refractory-metal plasma etching

US Patent 5575888 · Granted Nov 19, 1996

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Nanophotonics phased-array system for virtual and augmented reality multifocal d2025
Method of forming controllably conductive oxide2018
Zinc-water battery and system2017
Thin flexible rechargeable electrochemical energy cell and method of fabrication2016
Method of forming controllably conductive oxide2016
Method and system for automated generation of masks for spacer formation from a 2016
Method of forming controllably conductive oxide2015
Alignment method for semiconductor processing2013
Photolithographic mask exhibiting enhanced light transmission due to utilizing s2011
Stepper system for ultra-high resolution photolithography using photolithographi2011
Non-planarized, self-aligned, non-volatile phase-change memory array and method 2010
Technique for perfecting the active regions of wide bandgap semiconductor nitrid2008