Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5575888 | Sidewall passivation by oxidation during refractory-metal plasma etching | John Kosakowski, William Chu, Christie R. K. Marrian, Martin C. Peckerar | 1996-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5575888 | Sidewall passivation by oxidation during refractory-metal plasma etching | John Kosakowski, William Chu, Christie R. K. Marrian, Martin C. Peckerar | 1996-11-19 |