Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Photolithographic technique and illuminator using real-time addressable phase shift light shift

Photolithographic technique and illuminator using real-time addressable phase shift light shift

US Patent 5539567 · Granted Jul 23, 1996

Estimated economic value: $8,497,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Array description system for large patterns2021
Forced grid method for correcting mask patterns for a pattern transfer apparatus2020
Increasing and controlling sensitivity of non-linear metallic thin-film resists2019
Dynamic patterning method that removes phase conflicts and improves pattern fide2019
Microelectromechanical mirror assembly2019
Microelectromechanical mirror assembly2018
Medical linear accelerator signal analyzer and display device2018
Increasing and controlling sensitivity of non-linear metallic thin-film resists2017
Memorabilia storage device2015
Weapon stabilizer / hanger2015
Memorabilia storage device2015
Memorabilia storage device2015