Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of determining a dechucking voltage which nullifies a residual electrostatic force between an electrostatic chuck and a wafer

Method of determining a dechucking voltage which nullifies a residual electrostatic force between an electrostatic chuck and a wafer

US Patent 5491603 · Granted Feb 13, 1996

Estimated economic value: $94,211,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Low contrast non-referential defect detection2025
Device for pressing materials guided by rollers for carpentry cutting2025
Apparatus to characterize substrates and films2025
Imaging systems and methods for image-guided radiosurgery2025
Systems and methods for secure storage and retrieval of trade data2025
Therapeutic radiation beam detector for radiation treatment systems2023
Revolving radiation collimator2023
Computer system providing mirrored SaaS application sessions and related methods2023
Systems and methods for secure storage and retrieval of trade data2023
Systems and methods for secure storage and retrieval of trade data2022
Revolving radiation collimator2021
Soil measurement system using wireless signals2020