Low temperature plasma oxidation process

Assignee

• IBM

Inventors

• David M. Dobuzinsky (55 patents)
• David L. Harmon (20 patents)
• Srinandan R. Kasi (4 patents)
• Donald M. Kenney (53 patents)
• Son V. Nguyen (274 patents)
• Tue Nguyen (105 patents)
• Pai-Hung Pan (114 patents)

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