Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cryogenic station

Cryogenic station

US Patent 5373701 · Granted Dec 20, 1994

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate scanning apparatus with pendulum and rotatable substrate holder2025
Pressure control strategies to provide uniform treatment streams in the manufact2023
Treatment systems with repositionable nozzle useful in the manufacture of microe2022
Pressure control strategies to provide uniform treatment streams in the manufact2022
Processing system and method for providing a heated etching solution2018
Processing system and method for providing a heated etching solution2017
Method of substrate temperature control during high temperature wet processing2016
Method of using separate wafer contacts during wafer processing2016
Method for the recovery and re-use of process gases2010
Advanced process control for low variation treatment in immersion processing2007
Method and apparatus for producing a purified liquid2007
Apparatus for surface conditioning2006