Polysilane monomolecular film and polysilane built-up film

Assignee

• Kabushiki Kaisha Toshiba

Inventors

• Shuji Hayase (28 patents)
• Yoshihiko Nakano (96 patents)
• Yukihiro Mikogami (14 patents)
• Akira Yoshizumi (19 patents)
• Shinji Murai (78 patents)
• Rikako Kani (8 patents)

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