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Home › Radiation-sensitive compositions containing novolak polymers made from four phenolic derivatives and an aldehyde

Radiation-sensitive compositions containing novolak polymers made from four phenolic derivatives and an aldehyde

US Patent 5324620 · Granted Jun 28, 1994

Estimated economic value: $1,662,000 ⓘ

Assignee

Ocg Microelectronic Materials

Inventors

Charles E. Ebersole (3 patents)

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