{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Process for imaging of photoresist including treatment of the photoresist with an organometallic compound", "item": "https://www.patentleaderboard.com/patent/5250395"}]}

Home › Process for imaging of photoresist including treatment of the photoresist with an organometallic compound

Process for imaging of photoresist including treatment of the photoresist with an organometallic compound

US Patent 5250395 · Granted Oct 5, 1993

Estimated economic value: $6,887,000 ⓘ

Assignee

IBM

Inventors

Robert David Allen (115 patents)
Scott A. MacDonald (28 patents)
Dennis McKean (40 patents)
Hubert Schlosser (19 patents)
Robert J. Twieg (24 patents)
Gregory Michael Wallraff (59 patents)
Carlton G. Willson (42 patents)

View full patent text on Google Patents →