Radiation-sensitive composition containing 1,2-quinonediazide compound, alkali-soluble resin and monooxymonocarboxylic acid ester solvent

Assignee

• Japan Synthetic Rubber

Inventors

• Yoshihiro Hosaka (18 patents)
• Ikuo Nozue (14 patents)
• Masashige Takatori (10 patents)
• Yoshiyuki Harita (20 patents)

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