Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Dark field imaging defect inspection system for repetitive pattern integrated circuits

Dark field imaging defect inspection system for repetitive pattern integrated circuits

US Patent 5177559 · Granted Jan 5, 1993

Estimated economic value: $12,574,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Detection of road surface defects2021
Photonic waveguide coupling using offset light source2020
Photonic waveguide coupling using offset light source2019
Electro-optic phase modulator with no residual amplitude modulation2018
Near-threshold optical transmitter pre-distortion2017
Silicon photonics wafer using standard silicon-on-insulator processes through su2014
Method, system, and computer program product for implementing stream processing 2012
User configurable multivariate time series reduction tool control method2004
User configurable multivariate time series reduction tool control method2003
User configurable multivariate time series reduction tool control method2002
Downstream monitor for CMP brush cleaners1999
Fluid transmissive moderated flow resistance heat transfer unit1999