Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High density plasma deposition and etching apparatus

High density plasma deposition and etching apparatus

US Patent 5091049 · Granted Feb 25, 1992

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma generator, plasma control method and method of producing substrate2013
Plasma generator, plasma control method, and method of producing substrate2010
High frequency power supply device and plasma generator2009
Plasma generator2006
Apparatus for coating substrates1997
Apparatus for coating substrates1997
High density plasma deposition and etching apparatus1995
High density plasma deposition and etching apparatus1995
High density plasma deposition and etching apparatus1995
High density plasma deposition and etching apparatus1995
Closure plate for covering opening of floor panels1992
High density plasma deposition and etching apparatus1992