Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma generator, plasma control method and method of producing substrate

Plasma generator, plasma control method and method of producing substrate

US Patent 8444806 · Granted May 21, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Radio-frequency antenna and plasma processing device2025
Plasma generator2023
Radio-frequency antenna unit and plasma processing apparatus2015
Radio-frequency antenna unit and plasma processing apparatus2015
Plasma processing apparatus2015
Plasma processing apparatus2015
Thin-film forming sputtering system2014
Thin-film forming sputtering system2014
Plasma generation device and plasma processing device2014
Silicon dot forming method and silicon dot forming apparatus2011
Plasma producing method and apparatus as well as plasma processing apparatus2011
Plasma producing method and apparatus as well as plasma processing apparatus2011