Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9078336 | Radio-frequency antenna unit and plasma processing apparatus | Akinori Ebe | 2015-07-07 |
| 8931433 | Plasma processing apparatus | Akinori Ebe, Eiji Ino, Shinichiro Ishihara, Hajime Ashida, Akira Watanabe | 2015-01-13 |
| 8916034 | Thin-film forming sputtering system | Akinori Ebe, Jeon Geon Han | 2014-12-23 |
| 8444806 | Plasma generator, plasma control method and method of producing substrate | Shoji Miyake, Akinori Ebe, Tatsuo Shoji | 2013-05-21 |
| 7988835 | Silicon dot forming method and silicon dot forming apparatus | Eiji Takahashi, Takashi Mikami, Shigeaki Kishida, Kenji Kato, Atsushi Tomyo +2 more | 2011-08-02 |
| 7880392 | Plasma producing method and apparatus as well as plasma processing apparatus | Kenji Kato, Hiroshige Deguchi, Hitoshi Yoneda, Kiyoshi Kubota, Akinori Ebe | 2011-02-01 |
| 7785441 | Plasma generator, plasma control method, and method of producing substrate | Shoji Miyake, Akinori Ebe, Tatsuo Shoji | 2010-08-31 |
| 7567037 | High frequency power supply device and plasma generator | Tatsuo Shoji, Masayoshi Kamai | 2009-07-28 |
| 7098599 | Plasma generator | Shoji Miyake, Tatsuo Shoji | 2006-08-29 |