| 9078336 |
Radio-frequency antenna unit and plasma processing apparatus |
Akinori Ebe |
2015-07-07 |
| 8931433 |
Plasma processing apparatus |
Akinori Ebe, Eiji Ino, Shinichiro Ishihara, Hajime Ashida, Akira Watanabe |
2015-01-13 |
| 8916034 |
Thin-film forming sputtering system |
Akinori Ebe, Jeon Geon Han |
2014-12-23 |
| 8444806 |
Plasma generator, plasma control method and method of producing substrate |
Shoji Miyake, Akinori Ebe, Tatsuo Shoji |
2013-05-21 |
| 7988835 |
Silicon dot forming method and silicon dot forming apparatus |
Eiji Takahashi, Takashi Mikami, Shigeaki Kishida, Kenji Kato, Atsushi Tomyo +2 more |
2011-08-02 |
| 7880392 |
Plasma producing method and apparatus as well as plasma processing apparatus |
Kenji Kato, Hiroshige Deguchi, Hitoshi Yoneda, Kiyoshi Kubota, Akinori Ebe |
2011-02-01 |
| 7785441 |
Plasma generator, plasma control method, and method of producing substrate |
Shoji Miyake, Akinori Ebe, Tatsuo Shoji |
2010-08-31 |
| 7567037 |
High frequency power supply device and plasma generator |
Tatsuo Shoji, Masayoshi Kamai |
2009-07-28 |
| 7098599 |
Plasma generator |
Shoji Miyake, Tatsuo Shoji |
2006-08-29 |