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Home › Sub-valent molybdenum, tungsten, and chromium amides as sources for thermal chemical vapor deposition of metal-containing films

Sub-valent molybdenum, tungsten, and chromium amides as sources for thermal chemical vapor deposition of metal-containing films

US Patent 5064686 · Granted Nov 12, 1991

Estimated economic value: $1,169,000 ⓘ

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