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Home › Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head

Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head

US Patent 5051379 · Granted Sep 24, 1991

Estimated economic value: $15,462,000 ⓘ

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