Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer

Assignee

• Tel Sagami Limited

Inventors

• Hironobu Nishi (21 patents)
• Kenichi Yamaga (38 patents)
• Takanobu Asano (19 patents)
• Kazutoshi Sawado (2 patents)
• Masashi FUMOTO (2 patents)
• Shozo Ito (3 patents)
• Yoshinori Mochizuki (21 patents)

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