Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for erosion detection of a sputtering target and target arrangement

Method for erosion detection of a sputtering target and target arrangement

US Patent 4983269 · Granted Jan 8, 1991

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Process and apparatus for sputter etching or sputter coating2001
Cathode arrangement1994
Method for controlling evaporation for vapor deposition1994
Electron beam generator and emission cathode1992
Method for the control of an evaporation process1991
Method for the cooling of targets as well as cooling device for targets1991
Method and device for the deflection of a beam1991
Process and system for the control of the focusing of a beam of monopolar charge1991
Method and control arrangement for the evaporation rate of an electron beam1991
Vapor source for vacuum coating installation1988
Apparatus for coating materials by cathode sputtering1986
Cathode arrangement for sputtering material from a target in a cathode sputterin1984