Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cathode arrangement

Cathode arrangement

US Patent 5343112 · Granted Aug 30, 1994

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Process and apparatus for sputter etching or sputter coating2001
optical device and method for coating an optical substrate1997
Method for controlling evaporation for vapor deposition1994
Method for controlling evaporation for vapor deposition1994
Electron beam generator and emission cathode1992
Electron beam generator and emission cathode1992
Method for the control of an evaporation process1991
Method for the control of an evaporation process1991
Method for the cooling of targets as well as cooling device for targets1991
Method and device for the deflection of a beam1991
Method and device for the deflection of a beam1991
Process and system for the control of the focusing of a beam of monopolar charge1991