X-ray lithography system

Assignee

• Hampshire Instruments

Inventors

• James M. Forsyth (7 patents)
• Joseph A. Abate (4 patents)
• Thomas L. Duft (2 patents)
• Malcolm M. Drummond (1 patents)
• Lisa Gregorka (1 patents)
• John Hoose (11 patents)
• Robert G. Zambelli (12 patents)

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