| 8279525 |
Three-dimensional diffractive structure, method for making, and applications thereof |
— |
2012-10-02 |
| 8116002 |
Grating device with adjusting layer |
— |
2012-02-14 |
| 7751461 |
Linewidth-narrowed excimer laser cavity |
— |
2010-07-06 |
| 6958859 |
Grating device with high diffraction efficiency |
Robert Frankel, Evgeny Popov, Michel Nevière |
2005-10-25 |
| 6724533 |
Lamellar grating structure with polarization-independent diffraction efficiency |
Robert Frankel, Evgeny Popov |
2004-04-20 |
| 6697411 |
Modulatable multi-wavelength semiconductor external cavity laser |
Robert Frankel |
2004-02-24 |
| 6693925 |
Modulatable multi-wavelength fiber laser source |
Robert Frankel |
2004-02-17 |
| 6496622 |
Diffractive structure for high-dispersion WDM applications |
Robert Frankel, Evgeny Popov |
2002-12-17 |
| 6487019 |
Optical diffraction grating structure with reduced polarization sensitivity |
— |
2002-11-26 |
| 4980896 |
X-ray lithography system |
James M. Forsyth, Joseph A. Abate, Thomas L. Duft, Malcolm M. Drummond, Lisa Gregorka +1 more |
1990-12-25 |
| 4734923 |
Lithographic system mask inspection device |
Robert Frankel |
1988-03-29 |