Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4980896 | X-ray lithography system | James M. Forsyth, Joseph A. Abate, Malcolm M. Drummond, Lisa Gregorka, John Hoose +1 more | 1990-12-25 |
| 4870668 | Gap sensing/adjustment apparatus and method for a lithography machine | Robert Frankel, Marc MARTIN, David G. Baker | 1989-09-26 |