Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Accelerator for ion implantation

Accelerator for ion implantation

US Patent 4667111 · Granted May 19, 1987

Estimated economic value: $12,523,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System for improving energy purity and implant consistency, and for minimizing c2001
Dual-walled exhaust tubing for vacuum pump2001
Ion implantation control using charge collection, optical emission spectroscopy 2000
Dosimetry cup charge collection in plasma immersion ion implantation2000
Plasma immersion implantation with pulsed anode1999
Pulsed plate plasma implantation system and method1997
Ion beam implantation method and apparatus for particulate control1992
Method and apparatus for controlling article temperature during treatment in vac1985
Process and apparatus for converged fine line electron beam treatment objects1984
Process and apparatus for converged fine line electron beam treatment of objects1983