Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Shallow groove capacitor fabrication method

Shallow groove capacitor fabrication method

US Patent 4650544 · Granted Mar 17, 1987

Estimated economic value: $6,823,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Composite tantalum nitride/tantalum copper capping layer2007
Predicting EM reliability by decoupling extrinsic and intrinsic sigma2006
Stabilizing fluorine etching of low-k materials2006
Composite tantalum capped inlaid copper with reduced electromigration and reduce2006
Minimizing transistor size in integrated circuits2006
Copper interconnects with metal capping layer and selective copper alloys2005
Method of forming a selective barrier layer using a sacrificial layer2005
Continuous barrier for interconnect structure formed in porous dielectric materi2004
Self-aligned conductive plugs in a semiconductor device2004
Diffusion barrier and method for its production2004
Low temperature dielectric deposition to improve copper electromigration perform2004
Copper interconnect with improved barrier layer2004