Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for controlling alignment and brightness of an electron beam

Method and apparatus for controlling alignment and brightness of an electron beam

US Patent 4568861 · Granted Feb 4, 1986

Estimated economic value: $19,748,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Servo control for high emittance electron source2003
Servo guided stage system with yaw sensor2002
Real time measurement of leakage current in high voltage electron guns2002
Precision high speed magnetic coil driver circuit2002
Precision tool control system for a workpiece positioning apparatus1998
Real time alignment system for a projection electron beam lithographic system1998
Simultaneous deflections in charged-particle beams1997
Real time alignment system for a projection electron beam lithographic system1997
Electron beam nano-metrology system1996
Compensated servo control stage positioning apparatus1996
Servo guided stage system1992
High resolution automatic focus correction electronic subsystem for E-beam litho1989