Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Servo guided stage system with yaw sensor

Servo guided stage system with yaw sensor

US Patent 6466324 · Granted Oct 15, 2002

Estimated economic value: $14,907,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Servo control for high emittance electron source2003
Real time measurement of leakage current in high voltage electron guns2002
Precision high speed magnetic coil driver circuit2002
Precision tool control system for a workpiece positioning apparatus1998
Real time alignment system for a projection electron beam lithographic system1998
Real time alignment system for a projection electron beam lithographic system1997
Electron beam nano-metrology system1996
Compensated servo control stage positioning apparatus1996
Servo guided stage system1992
Electron beam writing method and system using large range deflection in combinat1989
Method and apparatus for controlling alignment and brightness of an electron bea1986
Automatic focus and deflection correction in E-beam system using optical target 1984