{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Foil electrode SPER light source", "item": "https://www.patentleaderboard.com/patent/4441189"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Foil electrode SPER light source

Foil electrode SPER light source

US Patent 4441189 · Granted Apr 3, 1984

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Extreme ultraviolet (EUV) lithography mask2020
Extreme ultraviolet mirrors and masks with improved reflectivity2019
Coatings of semiconductor quantum dots for improved visibility of electrodes and2018
Pellicle with aerogel support frame2017
Blazed grating spectral purity filter and methods of making such a filter2016
Method for a low profile etchable EUV absorber layer with embedded particles in 2016
Scattering enhanced thin absorber for EUV reticle and a method of making2016
Methods and systems for determining a dose-to-clear of a photoresist2016
Mask structures and methods of manufacturing2015
System and method for non-destructive decontamination of sensitive electronics u2012
Laser beam formatting module and method for fabricating semiconductor dies using2012
Method and system for detecting existence of an undesirable particle during semi2011