Method for fabricating semiconductor device and apparatus for processing substrate using plasma

Assignee

No assignee recorded.

Inventors

• Unknown
• Seong Gil LEE (9 patents)
• Wan Jae Park (33 patents)
• Young Je UM (7 patents)
• Dong Hul Kim (3 patents)
• Ji-Hye Lee (200 patents)
• Dong-Ho Oh (22 patents)
• Unknown
• Du Ri Kim (4 patents)

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