Non-lid-bonded MEMS resonator with phosphorus dopant

Assignee

No assignee recorded.

Inventors

• Charles I. Grosjean (77 patents)
• Ginel C. Hill (32 patents)
• Paul M. Hagelin (92 patents)
• Renata Melamud Berger (22 patents)
• Aaron Partridge (137 patents)
• Unknown

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