Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus, reactor mover for moving a reactor of the apparatus and method of maintaining the reactor of the apparatus

Substrate processing apparatus, reactor mover for moving a reactor of the apparatus and method of maintaining the reactor of the apparatus

US Patent 12412759 · Granted Sep 9, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method to process wafers2025
Injector configured for arrangement within a reaction chamber of a substrate pro2025
Injector configured for arrangement within a reactor of a vertical furnace and v2025
Apparatus for processing a plurality of substrates provided with an extractor ch2025
Apparatus for processing a plurality of substrates provided with an extractor ch2025
Wafer processing apparatus with a rotatable table2025
Flange and apparatus for processing substrates2025
Flange and apparatus for processing substrates2025
Flange and apparatus for processing substrates2025
Cassette lid opening device2025
Cassette lid opening device2025
Apparatus and methods for performing an in-situ etch of reaction chambers with f2025