Substrate inspection apparatus and substrate inspection method

Assignee

• Samsung
• Boston University

Inventors

• Jangwoon Sung (2 patents)
• Lei Tian (48 patents)
• Hao Wang (3 patents)
• Jiabei Zhu (1 patents)
• Myungjun Lee (27 patents)
• Wookrae Kim (14 patents)
• Seungbeom Park (133 patents)
• Junho Shin (12 patents)
• Hojun Lee (12 patents)

View full patent text on Google Patents →