Methods and apparatus for depositing amorphous indium tin oxide film

Assignee

• Applied Materials

Inventors

• Yaoying ZHONG (5 patents)
• Siew Kit Hoi (16 patents)
• Palaniappan Chidambaram (3 patents)
• Jaysen Chiam (1 patents)
• Li Ying Choo (2 patents)
• Jay Min Soh (5 patents)
• Xiao Tan (41 patents)
• Haomin Xu (1 patents)

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