Heterogeneous integration of components onto compact devices using moiré based metrology and vacuum based pick-and-place

Assignee

• University Of Texas System

Inventors

• Sidlgata V. Sreenivasan (143 patents)
• Paras Ajay (11 patents)
• Aseem Sayal (6 patents)
• Mark W. McDermott (25 patents)
• Shrawan Singhal (18 patents)
• Ovadia Abed (13 patents)
• Lawrence R. Dunn (18 patents)
• Vipul Goyal (3 patents)
• Michael Cullinan (8 patents)

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