Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ruthenium compound, thin-film forming raw material, and method of producing thin film

Ruthenium compound, thin-film forming raw material, and method of producing thin film

US Patent 12264168 · Granted Apr 1, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Thin-film forming raw material used in atomic layer deposition method, and metho2025
Thin-film forming raw material, thin-film and method of producing thin-film2025
Working machine2025
Cobalt compound, thin-film forming raw material, thin-film, and method of produc2025
Workpiece conveying apparatus and mounting and dismounting support mechanism for2025
Amidinate compound, dimer compound thereof, thin-film forming raw material, and 2025
Alkoxide compound, thin-film forming raw material, and method of producing thin-2025
Compound, thin-film forming raw material that contains said compound, and method2024
Compound, thin-film forming raw material that contains said compound, and method2024
Compound, thin-film forming raw material that contains said compound, and method2024
Ruthenium compound, raw material for forming thin film, and method for producing2023
Ruthenium compound, raw material for forming thin film, and method for producing2023