Substrate treating apparatus and substrate support unit

Assignee

• Semes Co.

Inventors

• Hyoungkyu Son (2 patents)
• Jong Hwan An (13 patents)
• Jae Hyun Cho (40 patents)
• Min Keun Bae (1 patents)
• Dong Suk Kim (31 patents)
• Hyeon Gyu Kim (15 patents)
• Ogsen Galstyan (7 patents)
• Won Seok Lee (98 patents)
• Sung Je Kim (23 patents)

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