Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Base structure and wafer placing device

Base structure and wafer placing device

US Patent 12238827 · Granted Feb 25, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma treatment apparatus member2025
Ceramic structure and wafer system2025
Ceramic structure and wafer system2025
Structural body and heating apparatus2024
Structural body and heating apparatus2024
Ceramic structure and wafer system2024
Ceramic structure and wafer system2024
Heater and method of production of same2024
Heater and method of production of same2024
Heater and method of production of same2024
Heater and heater system2024
Electrostatic chuck and method for manufacturing same2024