Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12238827 | Base structure and wafer placing device | Yasunori KAWANABE, Yoshihiro Okawa | 2025-02-25 |
| 12016087 | Heater and method of production of same | Yasunori KAWANABE, Yoshihiro Okawa, Shinya Terao | 2024-06-18 |
| 11961747 | Heater and heater system | Kazuto Maruyama, Keiichi Sekiguchi, Kazuhiko Fujio | 2024-04-16 |
| 10697707 | Heat exchange member and heat exchanger | Keiichi Sekiguchi, Kazuhiko Fujio | 2020-06-30 |
| 10684081 | Flow path member | Kiyotaka Nakamura, Masayuki Moriyama | 2020-06-16 |
| 10627173 | Flow path member, and heat exchanger and semiconductor manufacturing apparatus using same | Keiichi Sekiguchi, Kazuhiko Fujio | 2020-04-21 |
| 10566264 | Flow path member and semiconductor module | Takeshi MUNEISHI, Kazuhiko Fujio, Yoshiyuki Fukuda, Kentaro Takanami, Takao Shirai | 2020-02-18 |
| 10262917 | Flow passage member and semiconductor module | Kenji Komatsubara | 2019-04-16 |
| 10103047 | Flow path member, heat exchanger including the flow path member, and semiconductor manufacturing apparatus including the flow path member | Keiichi Sekiguchi, Kazuhiko Fujio | 2018-10-16 |
| 9953898 | Flow channel member, and heat exchanger and semiconductor module each using same | Masayuki Moriyama, Kazuhiko Fujio, Keiichi Sekiguchi | 2018-04-24 |
| 9388083 | Silicon carbide sintered body and sliding component using the same, and protective body | Mami Iida, Mieko Yashima, Kazuhiro Ishikawa | 2016-07-12 |
| 9293384 | Silicon nitride substrate, circuit substrate and electronic device using the same | Masayuki Moriyama, Kenji Komatsubara | 2016-03-22 |
| 8916488 | Sliding member, manufacturing method thereof, mechanical seal ring using sliding member and mechanical seal using mechanical seal ring | Kazuaki Takigawa | 2014-12-23 |
| 8366071 | Sliding member, mechanical seal ring, mechanical seal and faucet valve | Mieko Yashima | 2013-02-05 |